Plasma Sputtering Coater

NST-SPUTTERING IS A COMPACT PLASMA SPUTTERING COATER designed for making metallic coatings, such as gold, platinum, Indium and silver etc. Especially for coating conductive gold film for SEM sample. The plasma sputtering coater is shipped with all necessary accessories for immediate use, including one sputtering head with gold sputtering target (gold cathode), Vacuum pump, stainless steel bellows and quick clamps.

Vacuum Accessories

The followings are included:

• 156 L/m Double Stage Rotary Vane Vacuum Pump with vapor trap ( Max vacuum 10e-2 torr)
• Stainless steel bellows with KF16 adapter and quick clamps
• Two Stage Exhaust Filter on vacuum pump to eliminate oil vapor contamination
• One High purity Au target (57mm dia.x0.12mm, 4N)
• Optional: you may use a turbo pump to achieve 10E-5 torr vacuum by a turbo pump

Application Notes

• For the best film strength, please use plasma cleaner to clean sample surface before coating
• The system requires an Ar gas tank with pressure regulator which is not included sputtering head connects to high voltage. The operator must wear electric insulation gloves during operation.
• The sputtering coater can be placed into an Ar and N2 gas glove box for coating
• This model is not suitable for coating light metallic material such as Al, Mg and Zinc or Carbon target due to low energy. Please consider our Magnetron-sputtering coater or Carbon Evaporation Coating.

NST THREE TARGET HEADS PLASMA SPUTTERING COATER is a cost-effective plasma sputter coating equipment independently developed by our company. The plasma sputtering target is a standard size of 2 inches. Customers can choose different configurations of 1~3 target heads according to their needs to meet the different experimental needs of single-layer film or multilayer films of various materials. The instrument is equipped with a 150W DC high-voltage power supply, which can be used for metal sputter coating, especially for the coating of metals such as gold, silver and copper. This film coater is equipped with a gas connection for the introduction of protective gas. The instrument adopts touch screen control, which is simple and intuitive to use. It can realize the operation of coating start and stop, switch target head position and baffle rotation with one button, which is very suitable for laboratory purchase.

This film coater is equipped with a two-stage rotary vane vacuum pump. It has the advantages of small volume, quick vacuuming and simple operation. If customers need to further improve the vacuum degree, you can contact the technician to select the molecular pump group to form a high vacuum system.

Two target heads plasma sputtering coater application

It can be used for metal sputter coating, especially for metal coatings such as gold, silver and copper.

This type of SMALL PLASMA SPUTTERING COATING MACHINE adopts two-stage sputtering method, which is widely used for SEM sample preparation or metal coating experiment. Using low-temperature plasma sputtering process, there is no high temperature during the coating process, and it is not easy to produce thermal damage.This small plasma sputtering coater uses PLC control system, all touch screen operation, easy to learn and use. This model machine is also equipped with a rotatable sample stage, which can effectively improve the uniformity of the coating. This small plasma sputtering instrument uses a PLC control system, all touch screen operation, easy to learn and use. The equipment is small in size and beautiful in appearance, making it the best choice for laboratory coating experiments.

NST THE SMALL PLASMA SPUTTERING COATER is a cost-effective plasma sputter coating equipment independently developed by our company. It has the advantages of compact structure, easy to use, high integration and strong sense of design. The plasma sputtering target is a standard size of 2 inches. The instrument is equipped with a 150W DC high-voltage power supply, which can be used for metal sputter coating, especially for the coating of precious metals such as gold, silver and copper. It is often used in the preparation of conductive films for laboratory scanning electron microscope samples. It is also called “gold spraying machine”. This film coater is equipped with a gas connection for the introduction of protective gas. If the customer needs to pass the mixed gases, the staff can be contacted to configure the high-precision mass flow meter to meet the experimental needs.

This film coater is equipped with a two-stage rotary vane vacuum pump. It has the advantages of small volume, quick vacuuming and simple operation. If customers need to further improve the vacuum degree, the technician can contact the technician to select the molecular pump group to form a high vacuum system.

THE PLASMA SPUTTERING AND EVAPORATION TWO-IN-ONE COATING MACHINE is equipped with DC sputtering target and thermal evaporation assembly, which can not only be used for metal film plating by plasma sputtering, but also obtain carbon or other metal elemental films by evaporation. The instrument components are highly integrated, which realize two kinds of coating functions in the same chamber. This coating machine adopts high purity quartz chamber as vacuum chamber, and the coating process is completely visible. The instrument is equipped with two stage rotary vane vacuum pump, which can quickly reach the vacuum degree of 1.0E-1pa, and can meet the vacuum environment required by most evaporation coating experiments and diode sputtering experiments. This instrument has small size which can save space and can be used on the test bench. One machine has multiple purposes, which is cost-effective and very suitable for major universities and research institutions to choose.

Small two-in-one coating machine applications:

Scanning electron microscope sample surface gold spraying, gold steaming carbon spraying and other operations, as well as the production of non-conductor material test electrode.